The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2010
Filed:
Aug. 16, 2007
George Z. Radominski, Corvallis, OR (US);
Chris Aschoff, Corvallis, OR (US);
Alexander Govyadinov, Corvallis, OR (US);
Silam J. Choy, Corvallis, OR (US);
Martha A. Truninger, Corvallis, OR (US);
George Z. Radominski, Corvallis, OR (US);
Chris Aschoff, Corvallis, OR (US);
Alexander Govyadinov, Corvallis, OR (US);
Silam J. Choy, Corvallis, OR (US);
Martha A. Truninger, Corvallis, OR (US);
Hewlett-Packard Development Company, L.P., Houston, TX (US);
Abstract
In one embodiment a method of making an electrostatic actuator includes: forming a first conductor over a first substrate to form a first structure; forming a flexible second conductor over a second substrate to form a second structure; forming an etch stop over the first conductor as part of the first structure or over the second conductor as part of the second structure; forming a spacer on the etch stop, the spacer selectively etchable with respect to the etch stop; etching the spacer through to the etch stop at a location of a gap between the first conductor and the second conductor; and bonding the first structure and the second structure together such that the first conductor is located opposite the second conductor across the gap.