The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2010
Filed:
Jul. 23, 2007
Takashi Kawakubo, Kanagawa-ken, JP;
Ryoichi Ohara, Kanagawa-ken, JP;
Tomio Ono, Kanagawa-ken, JP;
Toshihiko Nagano, Kanagawa-ken, JP;
Michihiko Nishigaki, Kanagawa-ken, JP;
Takaaki Yasumoto, Kanagawa-ken, JP;
Kazuhide Abe, Kanagawa-ken, JP;
Kenya Sano, Kanagawa-ken, JP;
Takashi Kawakubo, Kanagawa-ken, JP;
Ryoichi Ohara, Kanagawa-ken, JP;
Tomio Ono, Kanagawa-ken, JP;
Toshihiko Nagano, Kanagawa-ken, JP;
Michihiko Nishigaki, Kanagawa-ken, JP;
Takaaki Yasumoto, Kanagawa-ken, JP;
Kazuhide Abe, Kanagawa-ken, JP;
Kenya Sano, Kanagawa-ken, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A thin film piezoelectric actuator comprises a driving part at least one end of which is supported by an anchor portion. The driving part includes: a piezoelectric film, a first lower electrode provided under a first region of the piezoelectric film, a second lower electrode provided under a second region different from the first region of the piezoelectric film, a first upper electrode provided opposite to the first lower electrode on the piezoelectric film, a second upper electrode provided opposite to the second lower electrode on the piezoelectric film, a first connection part that electrically connects the first lower electrode and the second upper electrode via a first via hole formed in the piezoelectric film, and a second connection part that electrically connects the second lower electrode and the first upper electrode via a second via hole formed in the piezoelectric film.