The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 09, 2010

Filed:

Feb. 26, 2007
Applicants:

Young-joon Ahn, Daejeon, KR;

Suk-pil Kim, Yongin-si, KR;

Jong-jin Lee, Seongnam-si, KR;

Inventors:

Young-Joon Ahn, Daejeon, KR;

Suk-Pil Kim, Yongin-si, KR;

Jong-Jin Lee, Seongnam-si, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

In a memory device and a method of manufacturing the memory device, a pair of channel layers included in the memory device may be formed on a sidewall of the sacrificial single crystalline layer pattern located on a protrusion of a semiconductor substrate. Accordingly, an etch damage may be reduced at the channel layer. The sacrificial single crystalline layer pattern may be removed to generate a void between the pair of the channel layers. As a result, a generation of a coupling effect may be reduced between the channel layers.


Find Patent Forward Citations

Ahn, Young-Joon. (2010). Memory device and method of manufacturing the same (U.S. Patent No. 7674661). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7674661

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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