The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2010
Filed:
Aug. 08, 2006
Applicants:
Mamoru Miyawaki, Irvine, CA (US);
Jiang-rong Cao, Irvine, CA (US);
Inventors:
Mamoru Miyawaki, Irvine, CA (US);
Jiang-Rong Cao, Irvine, CA (US);
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); G02B 6/10 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of manufacturing a periodic grating structure for a component. The method includes forming first structured layer including a final periodic grating structure of a first material and a second material filling spaces between individual features of the final periodic grating structure, removing the second material using a first chemical process and annealing a portion of the first material into a third material using a second chemical process.