The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2010
Filed:
Aug. 01, 2006
Masayuki Toda, Yonezawa, JP;
Masaki Kusuhara, Tokyo, JP;
Masaru Umeda, Tokyo, JP;
Mitsuru Fukagawa, Tokyo, JP;
Masayuki Toda, Yonezawa, JP;
Masaki Kusuhara, Tokyo, JP;
Masaru Umeda, Tokyo, JP;
Mitsuru Fukagawa, Tokyo, JP;
Kabushiki Kaisha Watanabe Shoko, Tokyo, JP;
Abstract
A vaporizer has gas passage formed inside of main body of a dispersion part, a gas inlet opening to introduce pressurized carrier gas into gas passage, a part to supply raw materials solution to carrier gas passing gas passage, a gas outlet to send carrier gas including dispersed raw material solution to vaporization part, a dispersion part to flow through gas passage having a part to cool, a vaporization pipe connected with a reaction part and gas outlet of dispersion part of the device, and a heater to heat vaporization pipe is provided, a vaporization part to heat and vaporizes the carrier gas where raw materials solution is dispersed is provided, and a radiation prevention portion having small hole for the outside of gas outlet is provided.