The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2010
Filed:
Dec. 14, 2007
Teruya Fukaura, Fukuoka, JP;
Shinichiro Katsuki, Fukuoka, JP;
Yutaka Katahara, Tokyo, JP;
Seishi Shibata, Fukuoka, JP;
Teruya Fukaura, Fukuoka, JP;
Shinichiro Katsuki, Fukuoka, JP;
Yutaka Katahara, Tokyo, JP;
Seishi Shibata, Fukuoka, JP;
Mitsubishi Denki Kabushiki Kaisha, Chiyoda-Ku, Tokyo, JP;
Abstract
An acceleration sensor in accordance with an aspect of the present invention comprises a first substrate, a multilayer second substrate and a sensor portion. The multilayer second substrate is opposed to the first substrate. The multilayer second substrate is provided with an electrode drawing opening. Further, the multilayer second substrate consists of a plurality of layers. The sensor portion (a movable mass body and a fixed electrode) is provided in a sealed cavity portion which is formed between the first substrate and the multilayer second substrate which are opposed to each other.