The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2010
Filed:
May. 15, 2008
Henry N. Chapman, Livermore, CA (US);
Sasa Bajt, Livermore, CA (US);
Eberhard A. Spiller, Livermore, CA (US);
Stefan Hau-riege, Fremont, CA (US);
Stefano Marchesini, Oakland, CA (US);
Henry N. Chapman, Livermore, CA (US);
Sasa Bajt, Livermore, CA (US);
Eberhard A. Spiller, Livermore, CA (US);
Stefan Hau-Riege, Fremont, CA (US);
Stefano Marchesini, Oakland, CA (US);
Lawrence Livermore National Security, LLC, Livermore, CA (US);
Abstract
A system in one embodiment includes a source for directing a beam of radiation at a sample; a multilayer mirror having a face oriented at an angle of less than 90 degrees from an axis of the beam from the source, the mirror reflecting at least a portion of the radiation after the beam encounters a sample; and a pixellated detector for detecting radiation reflected by the mirror. A method in a further embodiment includes directing a beam of radiation at a sample; reflecting at least some of the radiation diffracted by the sample; not reflecting at least a majority of the radiation that is not diffracted by the sample; and detecting at least some of the reflected radiation. A method in yet another embodiment includes directing a beam of radiation at a sample; reflecting at least some of the radiation diffracted by the sample using a multilayer mirror; and detecting at least some of the reflected radiation.