The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2010
Filed:
Sep. 06, 2006
Nozomu Hayashi, Tochigi, JP;
Nozomu Hayashi, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A method of detecting positions of first and second marks, at least one of the first and second marks being associated with a substrate, and exposing the substrate to a pattern. The method includes steps of sensing an image of the first and second marks, an image of the first mark and an image of the second mark having respective periodic patterns, of which periods are different from each other, and being formed in respective regions separate from each other, performing an orthogonal transform of a signal of the sensed image to obtain frequency components corresponding to the first and second marks, calculating positions of the first and second marks based on phases of respective frequency components corresponding to the first and second marks in the transformed signal, and positioning the substrate based on the calculated positions to expose the positioned substrate to a pattern.