The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2010
Filed:
Aug. 16, 2007
Carel Van DE Beek, Eindhoven, NL;
Stefan Kreissig, Venusberg, DE;
Volker Hansel, Dresden, DE;
Sebastian Giessmann, Dresden, DE;
Frank-michael Werner, Dresden, DE;
Claus Dietrich, Thiendorf, DE;
Jorg Kiesewetter, Thiendorf, DE;
Carel van de Beek, Eindhoven, NL;
Stefan Kreissig, Venusberg, DE;
Volker Hansel, Dresden, DE;
Sebastian Giessmann, Dresden, DE;
Frank-Michael Werner, Dresden, DE;
Claus Dietrich, Thiendorf, DE;
Jorg Kiesewetter, Thiendorf, DE;
SUSS MicroTec Tech Systems GmbH, Sacka, DE;
Abstract
In a method and an apparatus for measuring temperature-controlled electronic components in a test station, a component to be measured is held and positioned using a chuck, has a temperature-controlled and directed fluid flow applied to it and is electrically contact-connected using probes and is measured. The setting of the temperature of the component to the temperature at which the measurement is intended to be carried out is effected solely using a directed fluid flow at a defined temperature.