The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2010
Filed:
Nov. 07, 2006
Matthias Metz, Palo Alto, CA (US);
Zhiyu Pan, Palo Alto, CA (US);
Brian Stark, Palo Alto, CA (US);
Markus Ulm, Wannweil, DE;
Gary Yama, Palo Alto, CA (US);
Matthias Metz, Palo Alto, CA (US);
Zhiyu Pan, Palo Alto, CA (US);
Brian Stark, Palo Alto, CA (US);
Markus Ulm, Wannweil, DE;
Gary Yama, Palo Alto, CA (US);
Robert Bosch, GmbH, Stuttgart, DE;
Abstract
There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a MEMS device, and technique of fabricating or manufacturing a MEMS device, having mechanical structures encapsulated in a chamber prior to final packaging. An embodiment further includes location of a piezoelectric material as part of a semiconductor sensing structure. The semiconductor sensing structure, in conjunction with the piezoelectric material, can be used as a sensing device to provide an output signal associated with a sensed event.