The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 02, 2010

Filed:

Oct. 03, 2007
Applicants:

George T. Wang, Albuquerque, NM (US);

Qiming LI, Albuquerque, NM (US);

J. Randall Creighton, Albuquerque, NM (US);

Inventors:

George T. Wang, Albuquerque, NM (US);

Qiming Li, Albuquerque, NM (US);

J. Randall Creighton, Albuquerque, NM (US);

Assignee:

Sandia Corporation, Albuquerque, NM (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/205 (2006.01); C30B 25/00 (2006.01); C30B 29/38 (2006.01); C30B 29/60 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for growing high quality, nonpolar Group III nitrides using lateral growth from Group III nitride nanowires. The method of nanowire-templated lateral epitaxial growth (NTLEG) employs crystallographically aligned, substantially vertical Group III nitride nanowire arrays grown by metal-catalyzed metal-organic chemical vapor deposition (MOCVD) as templates for the lateral growth and coalescence of virtually crack-free Group III nitride films. This method requires no patterning or separate nitride growth step.


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