The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2010
Filed:
Apr. 09, 2007
Byron Lovell Williams, Plano, TX (US);
Maxwell Walthour Lippitt, Iii, Rockwall, TX (US);
C. Matthew Thompson, Highland Village, TX (US);
Byron Lovell Williams, Plano, TX (US);
Maxwell Walthour Lippitt, III, Rockwall, TX (US);
C. Matthew Thompson, Highland Village, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
An embodiment relates generally to a method of forming a capacitor. The method includes depositing a first layer of polysilicon on a substrate and implanting a high dose of implant into the first layer of polysilicon. The method also includes depositing a layer of dielectric over the first layer of polysilicon and depositing a second layer of polysilicon over the layer of dielectric. The method further includes implanting an equivalent concentration of implant in both the first layer of polysilicon into the second layer of polysilicon.