The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2010
Filed:
Mar. 04, 2003
Yuri Kokotov, Maaleh Adumim, IL;
Alexander T. Schwarm, Austin, TX (US);
Efim Entin, Jerusalem, IL;
Jacques Seror, Jerusalem, IL;
Jehuda Hartman, Rehovot, IL;
Yossi Fisher, Jerusalem, IL;
Arulkumar P. Shanmugasundram, Sunnyvale, CA (US);
Moshe Sarfaty, Cupertino, CA (US);
Yuri Kokotov, Maaleh Adumim, IL;
Alexander T. Schwarm, Austin, TX (US);
Efim Entin, Jerusalem, IL;
Jacques Seror, Jerusalem, IL;
Jehuda Hartman, Rehovot, IL;
Yossi Fisher, Jerusalem, IL;
Arulkumar P. Shanmugasundram, Sunnyvale, CA (US);
Moshe Sarfaty, Cupertino, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method, system, and medium of modeling and/or for controlling a manufacturing process is disclosed. The method includes the steps of identifying one or more input parameters that cause a change in output characteristics, defining global nodes using estimated maximum and minimum values of the input parameters, and defining a mathematical equation that calculates a predicted output characteristic for each node. The method also includes the steps of receiving at least one empirical data point having one or more input parameter values and at least one empirical output value and adjusting the predicted output values at the nodes based on a difference between the at least one empirical output value and the predicted output characteristic calculated using the mathematical equation based on the one or more input parameter values.