Measuring module for rapid measurement of electrical, electronic and mechanical components at cryogenic temperatures and measuring device having such a module

Abstract

Measuring module for the measurement of an object (), having a measuring chamber (), with a contact element (), wherein the object to be measured () is thermally connected to a first contact surface () of the contact element (), and having a cold head () that can be thermally connected to a second contact surface () of the contact element (), wherein the contact element () consists of material with high thermal conductivity, characterized in that the cryo-refrigerator () together with the cold head is housed in a refrigerating chamber () that is physically separated from the measuring chamber () and can be evacuated separately from the latter, and the contact element () is thermally insulated from the outside wall of the measuring module, is part of a separating wall between the measuring chamber () and the refrigerating chamber (), and makes a local thermal connection between the measuring chamber () and the refrigerating chamber (), and with a contacting mechanism to vary heat flow in the hermetically sealed condition of the measuring module. With such a measuring module, cooling times and heating times of the object to be measured can be greatly reduced.