The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2010
Filed:
Jul. 30, 2008
Sang Hoon Cheon, Daejeon, KR;
Ho Jun Ryu, Seoul, KR;
Woo Seok Yang, Daejeon, KR;
Seong Mok Cho, Daejeon, KR;
Byoung Gon Yu, Daejeon, KR;
Chang Auck Choi, Daejeon, KR;
Sang Hoon Cheon, Daejeon, KR;
Ho Jun Ryu, Seoul, KR;
Woo Seok Yang, Daejeon, KR;
Seong Mok Cho, Daejeon, KR;
Byoung Gon Yu, Daejeon, KR;
Chang Auck Choi, Daejeon, KR;
Electronics & Telecommunications Research Institute, Daejeon, KR;
Abstract
Provided are a multilayer-structured bolometer and a method of fabricating the same. In the multilayer-structured bolometer, the number of support arms supporting the body of a sensor structure is reduced to one, and two electrodes are formed on the one support arm. Thus, the sensor structure is electrically connected with a substrate through the only one support arm. According to the multilayer-structured bolometer and method of fabricating the bolometer, the thermal conductivity of the sensor structure is considerably reduced to remarkably improve sensitivity to temperature, and also the pixel size of the bolometer is reduced to obtain high-resolution thermal images. In addition, the multilayer-structured bolometer can have a high fill-factor due to a sufficiently large infrared-absorbing layer, and thus can improve infrared absorbance.