The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2010
Filed:
May. 02, 2006
Bruce L. Couch, North Attleboro, MA (US);
Jonathan S. Ehrmann, Sudbury, MA (US);
Joseph V. Lento, Methuen, MA (US);
Shepard D. Johnson, Andover, MA (US);
Bruce L. Couch, North Attleboro, MA (US);
Jonathan S. Ehrmann, Sudbury, MA (US);
Joseph V. Lento, Methuen, MA (US);
Shepard D. Johnson, Andover, MA (US);
GSI Lumonics Corporation, Billerica, MA (US);
Abstract
A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. The number of resistance measurements are limited by using non-measurement cuts, using non-sequential collinear cutting, using spot fan-out parallel cutting, and using a retrograde scanning technique for faster collinear cuts. Non-sequential cutting is also used to manage thermal effects and calibrated cuts are used for improved accuracy. Test voltage is controlled to avoid resistor damage.