The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2010
Filed:
Nov. 01, 2004
Applicants:
Gwang Ho Hur, Yongin-shi, KR;
Jun Young Choi, Seoul, KR;
Sang Baek Lee, Suwon-shi, KR;
Cheol Won Lee, Anyang-shi, KR;
Inventors:
Gwang Ho Hur, Yongin-shi, KR;
Jun Young Choi, Seoul, KR;
Sang Baek Lee, Suwon-shi, KR;
Cheol Won Lee, Anyang-shi, KR;
Assignee:
Advanced Display Process Engineering Co., Ltd., Kyunggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
Abstract
A transfer chamber for a flat display device manufacturing apparatus is provided. The transfer chamber may combine functions of a transfer chamber and a load-lock chamber. A robot may be provided aside from a center of the transfer chamber, and a buffer may be provided so as to avoid interference with the robot. An aligner may adjust a position of a substrate mounted on the buffer.