The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2010
Filed:
Mar. 06, 2007
Method of forming metal thin film and metal wiring pattern and method of manufacturing display panel
Taek Hee Kim, Seoul, KR;
Pil Sang Yun, Seoul, KR;
Ho Min Kang, Suwon-Si, KR;
Bae Hyoun Jung, Seongnam-Si, KR;
Taek Hee Kim, Seoul, KR;
Pil Sang Yun, Seoul, KR;
Ho Min Kang, Suwon-Si, KR;
Bae Hyoun Jung, Seongnam-Si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A method of forming a metal thin film includes positioning a substrate in a region corresponding to a target, with the target including silver (Ag) and being provided in a reaction space, supplying an inert gas and an oxygen-containing gas into the reaction space. Moreover, the method further includes forming a silver (Ag)-containing conductive film on the substrate by generating plasma between the target and the substrate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile