The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2010
Filed:
Jun. 16, 2008
Chung-chih Feng, Kaohsiung, TW;
Wei-te Liu, Kaohsiung, TW;
Yung-chang Hung, Kaohsiung, TW;
Chun-ta Wang, Kaohsiung, TW;
I-peng Yao, Kaohsiung, TW;
Chung-Chih Feng, Kaohsiung, TW;
Wei-Te Liu, Kaohsiung, TW;
Yung-Chang Hung, Kaohsiung, TW;
Chun-Ta Wang, Kaohsiung, TW;
I-Peng Yao, Kaohsiung, TW;
Bestac Advanced Material Co., Ltd., Taoyuan County, TW;
Abstract
A groove structure for avoiding stripping of a polishing surface of a polishing pad, the polishing pad including a base material and a grinding layer. The base material has a surface. The grinding layer is disposed on the surface, and part of the surface around the edge of the base material is exposed. The grinding layer has a plurality of first grooves and second grooves, and the first grooves cross the second grooves to define a plurality of grinding areas. The exposed part of the surface around the edge of the base material is located between the first grooves, the second grooves and the edge of the polishing pad. The polishing pad contains more grinding liquid, to clean the small grinded pieces. The grinding layer does not have an acute structure and is not easily peeled to form the small grinded pieces. Therefore, grinding quality and grinding effect are improved.