The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2010
Filed:
May. 24, 2004
Applicants:
Ralph E. Busch, Olney, MD (US);
Dennis Krausman, Annapolis, MD (US);
Inventors:
Ralph E. Busch, Olney, MD (US);
Dennis Krausman, Annapolis, MD (US);
Assignee:
Sonix, Inc., Springfield, VA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 29/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method and apparatus for ultrasonic scanning of a wafer assembly is disclosed. The wafer assembly is held in a wafer chuck and rotated. A transducer generates ultrasound in the wafer assembly and the ultrasound emitted from the wafer assembly is sensed. A controller adjusts the relative positions of the wafer and the transducer and controls the transducer to generate ultrasound at a number of scan points.