The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2010
Filed:
May. 20, 2005
Applicants:
Hideo Nakagawa, Shiga, JP;
Atsushi Ikeda, Shiga, JP;
Nobuo Aoi, Hyogo, JP;
Inventors:
Assignee:
Panasonic Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/52 (2006.01); H01L 21/4763 (2006.01); H01L 23/48 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor device includes an insulation filmformed on a silicon substrate, a buried metal interconnectformed in the insulation film, and a barrier metal filmformed between the insulation filmand the metal interconnect. The barrier metal filmis a metal compound film. The metal compound film is characterized by including at least one of elements forming the insulation film.