The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2010
Filed:
Nov. 16, 2005
Applicants:
Yoshihiro Nakata, Kawasaki, JP;
Ei Yano, Kawasaki, JP;
Inventors:
Yoshihiro Nakata, Kawasaki, JP;
Ei Yano, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Primary Examiner:
Int. Cl.
CPC ...
C08G 77/00 (2006.01); H01L 21/469 (2006.01);
U.S. Cl.
CPC ...
Abstract
The silica film forming material of the present invention comprises a silicone polymer which comprises, as part of its structure, CHx, an Si—O—Si bond, an Si—CHbond and an Si—CHx- bond, where x represents an integer of 0 to 2.