The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2010
Filed:
Aug. 06, 2007
Anthony Dicarlo, Richardson, TX (US);
Patrick I. Oden, McKinney, TX (US);
Richard L. Knipe, McKinney, TX (US);
Rabah Mezenner, Richardson, TX (US);
James D. Huffman, Plano, TX (US);
Anthony DiCarlo, Richardson, TX (US);
Patrick I. Oden, McKinney, TX (US);
Richard L. Knipe, McKinney, TX (US);
Rabah Mezenner, Richardson, TX (US);
James D. Huffman, Plano, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A micromirror arrayfabricated on a semiconductor substrate. The arrayis comprised of three operating layers. An addressing layeris fabricated on the substrate. A hinge layeris spaced above the addressing layerby an air gap. A mirror layeris spaced over the hinge layerby a second air gap. The hinge layerhas a hingeunder and attached to the mirror, the hingepermitting the mirrorto tilt. The hinge layerfurther has spring tipsunder the mirror, which are attached to the addressing layer. These spring tipsprovide a stationary landing surface for the mirror