The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2010
Filed:
Mar. 12, 2002
Maxim Zalalutdinov, Ithaca, NY (US);
Anatoli Olkhovets, Ithaca, NY (US);
Alan T. Zehnder, Ithaca, NY (US);
Bojan Ilic, Ithaca, NY (US);
David Alan Czaplewski, Ithaca, NY (US);
Lidija Sekaric, Ithaca, NY (US);
Jeevak M. Parpia, Ithaca, NY (US);
Harold G. Craighead, Ithaca, NY (US);
Maxim Zalalutdinov, Ithaca, NY (US);
Anatoli Olkhovets, Ithaca, NY (US);
Alan T. Zehnder, Ithaca, NY (US);
Bojan Ilic, Ithaca, NY (US);
David Alan Czaplewski, Ithaca, NY (US);
Lidija Sekaric, Ithaca, NY (US);
Jeevak M. Parpia, Ithaca, NY (US);
Harold G. Craighead, Ithaca, NY (US);
Cornell Research Foundation, Inc., Ithaca, NY (US);
Abstract
A micro-electrical mechanical oscillator has a resonant frequency of oscillation that is varied by application of heat. The resonant frequency is varied at a frequency different from the resonant frequency of the oscillator to amplify oscillations. In one embodiment, the oscillator is disc of material supported by a pillar of much smaller diameter than the disc. The periphery of the disc is heated by a laser to provide a time varying shift of the resonant frequency (or equivalently the stiffness) of the disc. Feedback from movement of the disc is used to modulate the intensity of the laser, and thus the stiffness of the disc to provide parametric amplification of sensed vibrations, using heating as a pump. Various other shapes of micro-electrical mechanical oscillators are used in other embodiment, including an array of such oscillators on a substrate, each having different resonant frequencies.