The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2010
Filed:
Jun. 27, 2007
David T. Chang, Calabasas, CA (US);
James H. Schaffner, Chatsworth, CA (US);
Tsung-yuan Hsu, Westlake Village, CA (US);
Adele E. Schmitz, Newbury Park, CA (US);
David T. Chang, Calabasas, CA (US);
James H. Schaffner, Chatsworth, CA (US);
Tsung-Yuan Hsu, Westlake Village, CA (US);
Adele E. Schmitz, Newbury Park, CA (US);
HRL Laboratories, LLC, Malibu, CA (US);
Boeing, Chicago, IL (US);
Abstract
Disclosed are methods for fabricating a micro-electro-mechanical switch. The switch has a cantilever arm disposed on a substrate that can be moved in orthogonal directions for latching and unlatching. For latching, the cantilever arm is moved back by a comb-drive actuator and then pulled down by electrodes disposed on the substrate and the cantilever arm. The comb-drive actuator switch is then released and the cantilever arm moves forward to be captured by a dove-tail structure on the substrate. When the voltage is removed, the cantilever arm is held in place by the dove-tail structure. The switch is unlatched by actuating the comb-drive actuator to move the cantilever arm away from the dove-tail structure. The cantilever arm will then pop up once it is released from the dove-tail structure.