The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2010
Filed:
Dec. 15, 2003
Applicants:
Bruce Whitefield, Camas, WA (US);
David Abercrombie, Gresham, OR (US);
Inventors:
Bruce Whitefield, Camas, WA (US);
David Abercrombie, Gresham, OR (US);
Assignee:
LSI Corporation, Milpitas, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/10 (2006.01); G06F 17/50 (2006.01);
U.S. Cl.
CPC ...
Abstract
An embodiment of the present invention provides a method to utilize data from many different die sizes and products so that highly detailed wafer profiles can be generated that have an improved signal to noise ratio and spatial resolution. Instead of being limited to single die size like normal wafer maps, this method takes advantage of multiple die sizes and their variation in placement on the wafer to increase the information available about the wafer patterns.