Semiconductor wafer, devices made therefrom, and method of fabrication

Abstract

A main semiconductor region of semiconducting nitrides is formed on a silicon substrate via a buffer region of semiconducting nitrides to provide devices such as HEMTs, MESFETs and LEDs. In order to render the wafer proof against warping, the buffer region is divided into a first and a second multilayered buffer subregion. The first buffer subregion comprises multiple alterations of a multi-sublayered first buffer layer and a non-sublayered second buffer layer. Each multi-sublayered first buffer layer of the first buffer subregion comprises multiple alternations of a first and a second buffer sublayer. The second buffer sublayers of each multi-sublayered first buffer layer either do not contain aluminum or do contain it in a higher proportion than do the first buffer sublayers. The second multilayered buffer subregion comprises multiple alternations of a first and a second buffer layer. The first buffer layers of the second multilayered buffer subregion are less in aluminum proportion than the fourth buffer layers of the second multilayered buffer subregion.