The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2010
Filed:
Oct. 10, 2006
Ui-hui Kwon, Hwaseong-si, KR;
Tai-kyung Kim, Anyang-si, KR;
Gyeong-su Keum, Suwon-si, KR;
Won-young Chung, Hwaseong-si Gyeonggi-do, KR;
Kwang-ho Cha, Gyeonggi-do, KR;
Ui-Hui Kwon, Hwaseong-si, KR;
Tai-Kyung Kim, Anyang-si, KR;
Gyeong-Su Keum, Suwon-si, KR;
Won-Young Chung, Hwaseong-si Gyeonggi-do, KR;
Kwang-Ho Cha, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Abstract
A filament member configured to discharge thermions may be employed in an ion source of an ion implantation apparatus. A filament member may include an anode disposed around a central portion of the filament member, a cathode disposed around a periphery of the filament and/or enclosing the anode, and at least one conductive path disposed between the anode and the cathode to discharge the thermions.