The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2010
Filed:
Dec. 19, 2007
Applicants:
Christopher W. Bergevin, San Jose, CA (US);
Shawn M. Collier Hernandez, Gilroy, CA (US);
Inventors:
Christopher W. Bergevin, San Jose, CA (US);
Shawn M. Collier Hernandez, Gilroy, CA (US);
Assignee:
Hitachi Global Storage Technologies Netherlands, B.V., Amsterdam, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/461 (2006.01);
U.S. Cl.
CPC ...
Abstract
Wafer structures and associated methods of fabrication are described. The wafer structures are fabricated to have aerodynamic shapes. Even if the structures on the wafer are fragile, the aerodynamic shapes of the structures create less resistance to a fluid flow of a cleaning process, and are less likely to be damaged by the cleaning process. Also, the aerodynamic shape of the structures allows a fluid flow to be directed toward the wafer from a single angle to effectively clean the wafer.