The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2010
Filed:
Dec. 21, 2006
Yasushi Migita, Kagoshima, JP;
Yasushi Migita, Kagoshima, JP;
Kyocera Corporation, , JP;
Abstract
The present invention provides a susceptor including a plate member having an upper surface on which a substrate is placed and a lower surface, a base member bonded to the lower surface of the plate member with a bonding layer, and an annular protective member disposed in an annular recess formed along a rim of a bonding portion of the plate member and the base member, in which a space is formed between the lower surface of the plate member and an upper surface of the protective member and/or between an upper surface of the base member and a lower surface of the protective member. The susceptor can inhibit generation of particles resulting from plasma corrosion, and can suppress extensive leakage of gas from a space or a gap between the plate member and a substrate.