The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2010
Filed:
Oct. 05, 2005
Sipke Wadman, Waalre, NL;
Sipke Wadman, Waalre, NL;
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Abstract
In one aspect, the amount of data needed to store image intensity data obtained from a scatterometer () such as a Parousiameter is reduced by varying a resolution with which the intensity data is used in different regions of a grid according to determined variations in the intensity. In another aspect, a scatterometer is provided with an aspherical mirror () for imaging a test sample () to correct for distortions introduced by the off center placement of the mirror relative to the test sample. In another aspect, an optical surface inspection apparatus uses an auxiliary lens () between a test surface () and an illuminated patterned grid () to project the patterned grid () on the test surface. A camera () is focused on the grid on the test surface as a real image.