The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2010
Filed:
Jan. 04, 2007
Takayuki Araki, Settsu, JP;
Takuji Ishikawa, Settsu, JP;
Takuji Kume, Settsu, JP;
Akinori Yamamoto, Settsu, JP;
Takayuki Araki, Settsu, JP;
Takuji Ishikawa, Settsu, JP;
Takuji Kume, Settsu, JP;
Akinori Yamamoto, Settsu, JP;
Daikin Industries, Ltd., Osaka, JP;
Abstract
There are provided a novel norbornene derivative which is a material for a chemically amplifying type photoresist for Flaser, possesses excellent transparency and improved dry etching resistivity and has a fluorine-containing ketone unit or fluorine-containing tertiary alcohol unit directly bonded to the norbornene backbone; a fluorine-containing polymer obtained by using the norbornene derivative as a copolymerizable monomer; and a chemically amplifying type photoresist composition comprising the fluorine-containing polymer, a photoacid generator and a solvent.