The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2010
Filed:
Nov. 15, 2006
Joerg Muchow, Reutlingen, DE;
Hubert Benzel, Pliezhausen, DE;
Markus Lang, Reutlingen, DE;
Regina Grote, Reutlingen, DE;
Simon Armbruster, Gomaringen, DE;
Gerhard Lammel, Tuebingen, DE;
Christoph Schelling, Reuflingen, DE;
Volkmar Senz, Metzingen, DE;
Joerg Muchow, Reutlingen, DE;
Hubert Benzel, Pliezhausen, DE;
Markus Lang, Reutlingen, DE;
Regina Grote, Reutlingen, DE;
Simon Armbruster, Gomaringen, DE;
Gerhard Lammel, Tuebingen, DE;
Christoph Schelling, Reuflingen, DE;
Volkmar Senz, Metzingen, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A micromechanical device and a method for producing this device are provided, the device having a sensor pattern that includes a spring pattern and a seismic mass. The seismic mass may be connected to the substrate material via the spring pattern, and a clearance may be provided in a direction perpendicular to the major substrate plane between the spring pattern and the substrate material. Alternatively, the spring pattern and the seismic mass may have a common, essentially continuous, front side surface.