The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2010
Filed:
Aug. 15, 2005
Hiroyuki Onishi, Kyoto, JP;
Hiroyuki Onishi, Kyoto, JP;
Dainippon Screen Mfg. Co., Ltd., Kyoto, JP;
Abstract
A defect detection apparatus () comprises an image pickup part () for picking up an image of a substrate () to acquire a grayscale target image, from which pixel values of the target image are sequentially outputted to a defect detector (). The defect detector () compares the target image with a reference image to generate a defect region image representing regions of defects included in a plurality of predetermined inspection regions, to be stored in a defect region image memory (). A computer () obtains an area and a barycentric position of each of the defects in the defect region image to specify an inspection region including the defect and performs limitation (i.e., selection) of defects on the basis of a defect detection condition set for each inspection region on the area of defect. It is possible to detect defects with high efficiency by using a defect detection condition on a different area of defect for each inspection region.