The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2010
Filed:
Nov. 21, 2007
Applicant:
Oliver Williams, Hasselt, BE;
Inventor:
Oliver Williams, Hasselt, BE;
Assignees:
Interuniversitair Microelektronica Centrum (IMEC), Leuven, BE;
Universiteit Hasselt, Diepenbeek, BE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A thickness shear mode (TSM) resonator is described, comprising a diamond layer. The diamond layer is preferably a high quality diamond layer with at least 90% spbonding or diamond bonding. A method for manufacturing such a resonator is also described. The thickness shear mode resonator according to embodiments described herein may advantageously be used in biosensor application and in electrochemistry applications.