The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 12, 2010

Filed:

Feb. 21, 2006
Applicant:

Motohiro Yasui, Nagoya, JP;

Inventor:

Motohiro Yasui, Nagoya, JP;

Assignee:

Brother Kogyo Kabushiki Kaisha, Nagoya-shi, Aichi-ken, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/22 (2006.01); H01L 41/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A lower electrodeincluding a low-temperature melting layerA and a high-temperature melting layerB having mutually different melting-start temperatures is provided between a vibration plateand a piezoelectric layer. In a calcination step of calcinating the lower electrode, the calcination is performed at a low temperature at which only the low-temperature melting layerA melts, and in an annealing-process step of the piezoelectric layer, the annealing process is performed at a high temperature at which the high-temperature melting layerB melts. At this time, in the calcination step, the melting of platinum nano-particles occurs in the low-temperature melting layerA, rendering the adhesion and diffusion-preventive effect. Further, in the annealing step, in the high-temperature melting layerB, platinum particles are melted, rendering the adhesion and diffusion-preventive effect. The degradation of piezoelectric characteristics of the piezoelectric actuator can be suppressed by the annealing process.


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