The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2010
Filed:
Jun. 02, 2008
Daniel L. Marks, Urbana, IL (US);
Brynmor J. Davis, Champaign, IL (US);
Stephen A. Boppart, Champaign, IL (US);
Paul Scott Carney, Champaign, IL (US);
Daniel L. Marks, Urbana, IL (US);
Brynmor J. Davis, Champaign, IL (US);
Stephen A. Boppart, Champaign, IL (US);
Paul Scott Carney, Champaign, IL (US);
The Board of Trustees of the University of Illinois, Urbana, IL (US);
Abstract
Methods and apparatus for three-dimensional imaging of a sample. A source is provided of a beam of light characterized by partial spatial coherence. The beam is focused onto a sample and scattered light from the sample is superposed with a reference beam derived from the source onto a focal plane detector array to provide an interference signal. A forward scattering model is derived relating measurement data to structure of an object to allow solutions of an inverse scattering problem, based upon the interference signal so that a three-dimensional structure of the same may be inferred. The partial spatial coherence of the source, which may be fixed or variable, may advantageously provide for rejection of multiple scattering artifacts and thus improve image quality.