The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2010
Filed:
Dec. 19, 2007
Liam O Suilleabhain, Bishopstown, IE;
Raymond Goggin, Watergrasshill, IE;
Eva Murphy, Raheen, IE;
Kieran P. Harney, Andover, MA (US);
Liam O Suilleabhain, Bishopstown, IE;
Raymond Goggin, Watergrasshill, IE;
Eva Murphy, Raheen, IE;
Kieran P. Harney, Andover, MA (US);
Analog Devices, Inc., Norwood, MA (US);
Abstract
A MEMS apparatus has a MEMS device sandwiched between a base and a circuit chip. The movable member of the MEMS device is attached at the side up against the circuit chip. The movable member may be mounted on a substrate of the MEMS device or formed directly on a passivation layer on the circuit chip. The circuit chip provides control signals to the MEMS device through wire bonds, vias through the MEMS device or a conductive path such as solder balls external to the MEMS device.