The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2010
Filed:
Jun. 01, 2005
Applicants:
Yoshiyuki Enomoto, Kanagawa, JP;
Ryuichi Kanamura, Tokyo, JP;
Inventors:
Yoshiyuki Enomoto, Kanagawa, JP;
Ryuichi Kanamura, Tokyo, JP;
Assignee:
Sony Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01);
U.S. Cl.
CPC ...
Abstract
In order to form an aluminum system wiring that does not peel off on an insulating film containing fluorine and to improve the reliability thereof, a semiconductor device according to the present invention includes an insulating film () containing fluorine formed on a substrate (), a titanium aluminum alloy film () formed on the insulating film () containing fluorine, and a metallic film () comprising aluminum or an aluminum alloy formed on the titanium aluminum alloy film ().