The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2010
Filed:
Oct. 07, 2005
Hiroshi Kudo, Kawasaki, JP;
Junko Naganuma, Kawasaki, JP;
Sadahiro Kishii, Kawasaki, JP;
Fujitsu Microelectronics Limited, Tokyo, JP;
Abstract
The method for fabricating a semiconductor device comprises the steps of: forming a dummy electrodeand a dummy electrode; forming a metal filmon the dummy electrode; conducting a thermal treatment at a first temperature to substitute the dummy electrodewith an electrodeof a material containing the constituent material of the metal film; forming a metal filmon the dummy electrode; and conducting a thermal treatment at a second temperature, which is lower than the first temperature and at which an interdiffusion of constituent materials between the electrodeand the metal filmdoes not take place, to substitute the second dummy electrode with an electrodeof a material containing the constituent material of the metal film