The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2010
Filed:
Sep. 20, 2007
Young-chul Ko, Yongin-si, KR;
Jin-woo Cho, Seongnam-si, KR;
U-hyuk Choi, Yongin-si, KR;
Seong-ho Shin, Yongin-si, KR;
Young-chul Ko, Yongin-si, KR;
Jin-woo Cho, Seongnam-si, KR;
U-hyuk Choi, Yongin-si, KR;
Seong-ho Shin, Yongin-si, KR;
Samsung Electro-Mechanics Co., Ltd, Suwon-si, KR;
Abstract
A rotational micro-electromechanical system (MEMS) having a piezo-resistor sensor is provided. The rotational MEMS device includes a pair of torsion springs that support a stage, four resistors, at least one of the resistors being formed along a center axis of the torsion springs, and electrical signal cables connected to the four resistors, wherein at least one of the torsion springs is formed in a <100> direction on an n-type silicon substrate having a () plane, and the resistors formed on the at least one of the torsion springs are formed in a <110> group direction.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile