The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2010
Filed:
Apr. 20, 2006
Masayasu Suzuki, Kyoto, JP;
Masayasu Suzuki, Kyoto, JP;
Shimadzu Corporation, Kyoto, JP;
Abstract
The present invention provides a surface wave excitation plasma generator in which surface wave excitation plasma is efficiently generated. A surface wave excitation plasma generator including an annular waveguide and a dielectric tube is provided. The annular waveguideincludes an inletfor introducing a microwave M, an end platefor reflecting the microwave M introduced and propagating within the waveguide, and a bottom plateon which slot antennasare formed at a predetermined interval. When the wavelength of the microwave M in the waveguide is λg, the length from position b through positions c, d, e to position f on the bottom plate, i.e. the circumferential length (π×D) of the annular waveguide, is set as 2 λg, and the positions b, c, d, e, f are spaced apart at an interval of λg/2. Since the slot antennasare arranged at two positions c and e, the interval between these two slot antennasis equal to the wavelength λg in the waveguide.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile