The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2009
Filed:
Dec. 19, 2006
Applicants:
Sven Axenbeck, Neuenburg, DE;
Markus Bannwarth, Freiburg, DE;
Martin Steuber, Buggingen, DE;
Peter Wiedemuth, Herbolzheim, DE;
Lothar Wolf, Sasbach, DE;
Inventors:
Sven Axenbeck, Neuenburg, DE;
Markus Bannwarth, Freiburg, DE;
Martin Steuber, Buggingen, DE;
Peter Wiedemuth, Herbolzheim, DE;
Lothar Wolf, Sasbach, DE;
Assignee:
Huettinger Elektronik GmbH + Co. KG, Freiburg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2006.01); G01R 31/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An arc detection means for detecting arcs in a plasma process includes at least one comparator to which an evaluation signal such as an output signal or an internal signal of an AC generator relating to the output signal and a reference value are supplied. The comparator is connected to a logic component that generates a signal for an arc suppression device.