The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2009
Filed:
Jun. 12, 2006
Shuzo Seo, Saitama, JP;
Shigeo Enomoto, Tokyo, JP;
Shuzo Seo, Saitama, JP;
Shigeo Enomoto, Tokyo, JP;
Hoya Corporation, Tokyo, JP;
Abstract
A stage apparatus includes a stationary support plate; a stage member provided on the stationary support plate so as to move on a reference plane parallel with the stationary support plate; Y-direction magnetic flux generating devices secured to one of the stationary support plate and the stage member; and Y-direction moving coils secured to the other of the stationary support plate and the stage member, the Y-direction moving coils receiving magnetic flux from the Y-direction magnetic flux generating devices so as to generate a driving force in a specific Y-direction between the Y-direction magnetic flux generating devices and the Y-direction moving coils. The Y-direction moving coils are secured to the stage member so that the Y-direction moving coils at least partly overlap each other in an X-direction, which is parallel with the reference plane and perpendicular to the Y-direction, and do not overlap in the Y-direction.