Plasma generating electrode, plasma generation device, and exhaust gas purifying device

Abstract

A plasma generating electrodeof the invention includes at least a pair of electrodes, at least one electrodeof the pair of electrodesincluding a plate-like ceramic bodyas a dielectric and a plurality of conductive filmsdisposed in the ceramic bodyand each having a plurality of through-holesformed through the conductive filmin its thickness direction in a predetermined arrangement pattern, the through-holeshaving a cross-sectional shape including an arc shape along a plane perpendicular to the thickness direction, an arrangement pattern of the through-holesformed in at least one conductive filmbeing different from an arrangement pattern of the through-holesformed in the other conductive film. The plasma generating electrodeis capable of simultaneously generating different states of plasma upon application of voltage between the pair of electrodesdue to the different arrangement patterns of the through-holesin the conductive films