The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2009
Filed:
May. 31, 2006
Hong Shih, Walnut, CA (US);
Harmeet Singh, Fremont, CA (US);
Raphael Casaes, Oakland, CA (US);
Duane Outka, Fremont, CA (US);
Mohammad Kamarehi, Gaithersburg, MD (US);
Hong Shih, Walnut, CA (US);
Harmeet Singh, Fremont, CA (US);
Raphael Casaes, Oakland, CA (US);
Duane Outka, Fremont, CA (US);
Mohammad Kamarehi, Gaithersburg, MD (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method of cleaning a microwave plasma applicator tube as described herein includes preparing a microwave plasma applicator for cleaning. A general cleaning of the plasma applicator tube is performed using an organic solvent wash and an ultrapure water wash. Selective cleanings of the tube are performed to remove selected contaminants. Such cleanings include a third wash with an alkaline cleaning solution, a fourth wash with an acidic cleaning solution and another wash using an ammonia and peroxide solution. The tube is rinsed using a sonicating wash performed in ultrapure water followed by drying. Also, the coil can be cleaned using acidic wash solution.