The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2009
Filed:
Jul. 12, 2005
Ryuta Araki, Amagasaki, JP;
Osamu Torayashiki, Amagasaki, JP;
Toru Kitamura, Amagasaki, JP;
Hiroshi Kawasaki, Amagasaki, JP;
Tsuyoshi Takemoto, Amagasaki, JP;
Koji Nakamura, Amagasaki, JP;
Christopher P. Fell, Plymouth, GB;
Kevin Townsend, Plymouth, GB;
Ian Sturland, Filton, GB;
Ryuta Araki, Amagasaki, JP;
Osamu Torayashiki, Amagasaki, JP;
Toru Kitamura, Amagasaki, JP;
Hiroshi Kawasaki, Amagasaki, JP;
Tsuyoshi Takemoto, Amagasaki, JP;
Koji Nakamura, Amagasaki, JP;
Christopher P. Fell, Plymouth, GB;
Kevin Townsend, Plymouth, GB;
Ian Sturland, Filton, GB;
Sumitomo Precision Products, Hyogo, JP;
Atlantic Inertial Systems Limited, Plymouth, GB;
Abstract
A vibrator, which is formed in a silicon waferby means of MEMS technique, has eight beam portions (beams)supported at a central portionand extending in the radial direction while mutually keeping the same angle and has a ring portionconnected to the eight beam portions. Outside the ring portion, eight electrodestofor electrostatic actuation, capacitance detection, or the like are spaced uniformly with a gapcreated between the ring portionand the electrodesto. Inside the ring portion, sixteen electrodesfor frequency adjustment are spaced uniformly with a gapcreated between the ring portionand the electrodes