The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2009
Filed:
Feb. 07, 2007
Bahadir Tunaboylu, Chandler, AZ (US);
Horst Clauberg, Warminster, PA (US);
Mark Cunningham, Queen Creek, AZ (US);
Senthil Theppakuttai, Scottsdale, AZ (US);
John Mcglory, Chandler, AZ (US);
Bahadir Tunaboylu, Chandler, AZ (US);
Horst Clauberg, Warminster, PA (US);
Mark Cunningham, Queen Creek, AZ (US);
Senthil Theppakuttai, Scottsdale, AZ (US);
John McGlory, Chandler, AZ (US);
SV Probe Pte. Ltd., Singapore, SG;
Abstract
An approach for fabricating cantilever probes for a probe card assembly includes forming posts on conductive traces on a substrate. A beam panel having beam elements formed therein is aligned to the substrate so that the beam elements are in contact with the plurality of posts. Each beam element is in contact with a post at a portion of the beam element so that both a first end portion and a second end portion overhang the post element. Each beam element is also attached to the beam panel by the first end portion. The beam elements are bonded to the plurality of posts. The first end portion of each beam element is cut, for example using an electrode, laser ablation or by dicing, to release the beam element from the beam panel. The beam panel is then removed, leaving the beam elements attached to the posts.