The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2009
Filed:
Feb. 27, 2007
Bahadir Tunaboylu, Chandler, AZ (US);
Horst Clauberg, Warminster, PA (US);
John Mcglory, Chandler, AZ (US);
Anh-tai Thai Nguyen, Gilbert, AZ (US);
Bahadir Tunaboylu, Chandler, AZ (US);
Horst Clauberg, Warminster, PA (US);
John McGlory, Chandler, AZ (US);
Anh-Tai Thai Nguyen, Gilbert, AZ (US);
SV Probe Pte. Ltd., Singapore, SG;
Abstract
A method for fabricating beams for a probe card includes dividing a large beam panel into smaller sub-panels before attaching the beams to corresponding posts on a substrate. Each sub-panel may have a sufficient number of beams to test several devices under test. The beam sub-panels may be aligned to the space transformer using alignment fiducials on the beam sub-panels that correspond to opposing alignment features formed in the space transformer or other substrate. Special tie-bars may be formed between: (1) rows, for example, of beams and the frame/frame splines (i.e., quadrant tie-bars); and (2) adjacent beams within any such rows on the beam panel (i.e., beam tie-bars). The approach may also include the use of tip tie-bars and/or tail tie-bars.