The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 22, 2009

Filed:

Jun. 18, 2004
Applicants:

Masanobu Miki, Utsunomiya, JP;

Kenji Dosaka, Shiyoa-gun, JP;

Yukio Miyairi, Nagoya, JP;

Yasumasa Fujioka, Nagoya, JP;

Masaaki Masuda, Nagoya, JP;

Takeshi Sakuma, Nagoya, JP;

Tatsuhiko Hatano, Kasugai, JP;

Inventors:

Masanobu Miki, Utsunomiya, JP;

Kenji Dosaka, Shiyoa-gun, JP;

Yukio Miyairi, Nagoya, JP;

Yasumasa Fujioka, Nagoya, JP;

Masaaki Masuda, Nagoya, JP;

Takeshi Sakuma, Nagoya, JP;

Tatsuhiko Hatano, Kasugai, JP;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 10/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A plasma generating electrode of the invention present includes at least a pair of electrodesat least one electrodeof the pair of electrodesincluding a plate-like ceramic bodyas a dielectric and a conductive filmdisposed inside the ceramic plateand having a plurality of through-holesformed through the conductive filmin its thickness direction, the through-holes having a cross-sectional shape including an arc shape along a plane perpendicular to the thickness direction. The plasma generating electrode can generate uniform and stable plasma at low power consumption.


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